Integrated Surface Acoustic Wave Device on an Aluminum Nitride Wafer

Additional contributors: Dr. Jong Noh, Yu Chen, Huan Li, Dr. Mo Li (faculty mentor)Surface acoustic wave (SAW) devices are essential for many signal processing applications, ranging from filtering a signal, creating a device for military use, or using them to create a cell phone with better reception. Surface acoustic waves are generated by applying an electric signal to a piezoelectric substrate, which then turns the electric signal into an acoustic wave. SAW devices contain rectangular-looking figures known as interdigital transducers, essential for converting the acoustic wave back into an electric signal at the output. Therefore, two SAW devices are required for this effect to occur. The piezoelectric substrate used in this project is Aluminum Nitride (AlN), which allows the user to send a high frequency to the SAW device and operate at high temperatures.This research was supported by the National Science Foundation