OBSERVATION OF INFRARED SiH in a $SiH_{4}$ PLASMA

Author Institution: Laboratoire d'Infrarouge, Universit\'e de Paris-Sud B\hat{a}timent 350; Laboratoire d'Infrarouge, Equipe de Synth\'ese des Couches Minces pour l'Energ\'etique L.P.N.H.E.A preliminary experiment of high resolution absorption and emission spectroscopy of a silane plasma in the $1800-2300 cm^{-1}$ range has been previously reported 1 . The detection of the 1-0 band of the free radical SiH, at $2000 cm^{-1}$ was then obtained with a poor signal-to-noise ratio. In order to increase the sensitivity of the detection a new experimental set-up has been built. The $SiH_{4}$ plasma is observed in a 2.5 m long source containing a White-type multi-reflexion system. The spectra are recorded with the Fourier transform interferometer of Laboratoire d’Infrarouge, with a simultaneous control the conditions of the excitation of the plasma. Description of the experimental system, and preliminary results are given. $^{1}$J.C. Knights, J.P.M Schmitt, J. Perrin and C. Guelachvili, J. Chem . Phys., 76, p.3414-3421 (1982)