Add to ORKGThe different phases of the powder formation in RF (oxygen-)silane plasmas are discussed. Mass spectrometry revealed large negative ions, which are supposed to act as powder precursors. The particle number density and particle sizes as determined by multi-angle polarization sensitive light scattering during the agglomeraton phase can be described by a neutral agglomeration scheme. Finally JR absorption spectroscopy has been used to study the chemical composition of the nanometer particles and has been applied to in-situ oxidation of plasma produced silicon particles
Experimental and theoretical investigations for growth of silicon nanoparticles (4 to 14 nm) in radi...
We have explored various gas phase processes for the fabrication of nanometersized Si and SiOx parti...
Nanometer size silicon nitride particles are synthesized using a pulsed radio frequency plasma techn...
The different phases of the powder formation in RF (oxygen-)silane plasmas are discussed. Mass spect...
In situ Fourier transform infrared absorption spectroscopy has been used to study the composition of...
Abstract; Particle formation has been investigated experimentally from the initial molecular precurs...
Negative ions have been clearly identified in silane rf plasmas used for the deposition of amorphous...
The formation of silicon particles in rf glow discharges has attracted attention due to their effect...
To determine self-consistently the time evolution of particle size and their number density in situ ...
Partial-depth modulation of the rf power in a capacitive discharge is used to investigate the relati...
Particle formation during low pressure SF6/argon etching of silicon in a single wafer parallel plate...
[eng] Ultrafine particles of silicon and related binary and ternary alloys of the Si-B-C-N system pr...
A pulsed rf plasma technique is capable of generating ceramic particles of 10 manometer dimension. E...
The transition pressure above which powder formation takes place was experimentally determined in a ...
Dust can be found anywhere: in the kitchen, in the car, in space… Not surprisingly we also see dust ...
Experimental and theoretical investigations for growth of silicon nanoparticles (4 to 14 nm) in radi...
We have explored various gas phase processes for the fabrication of nanometersized Si and SiOx parti...
Nanometer size silicon nitride particles are synthesized using a pulsed radio frequency plasma techn...
The different phases of the powder formation in RF (oxygen-)silane plasmas are discussed. Mass spect...
In situ Fourier transform infrared absorption spectroscopy has been used to study the composition of...
Abstract; Particle formation has been investigated experimentally from the initial molecular precurs...
Negative ions have been clearly identified in silane rf plasmas used for the deposition of amorphous...
The formation of silicon particles in rf glow discharges has attracted attention due to their effect...
To determine self-consistently the time evolution of particle size and their number density in situ ...
Partial-depth modulation of the rf power in a capacitive discharge is used to investigate the relati...
Particle formation during low pressure SF6/argon etching of silicon in a single wafer parallel plate...
[eng] Ultrafine particles of silicon and related binary and ternary alloys of the Si-B-C-N system pr...
A pulsed rf plasma technique is capable of generating ceramic particles of 10 manometer dimension. E...
The transition pressure above which powder formation takes place was experimentally determined in a ...
Dust can be found anywhere: in the kitchen, in the car, in space… Not surprisingly we also see dust ...
Experimental and theoretical investigations for growth of silicon nanoparticles (4 to 14 nm) in radi...
We have explored various gas phase processes for the fabrication of nanometersized Si and SiOx parti...
Nanometer size silicon nitride particles are synthesized using a pulsed radio frequency plasma techn...