A combined semi-analytic and experimental approach for multiphysical nonlinear MEM resonators

In this paper a semi-analytical approach is proposed for predictive modelling of microelectromechanical systems. The approach will be demonstrated for a clamped-clamped beam resonator, which involves the mechanical, electrical, and thermal domains. Theoretical steady-state responses, which, depending on the values of the excitation parameters, show both hardening and softening behaviour, are validated by experimental results