International audienceMultilayered structures with 14-50 nm periods composed of titanium and two different titanium oxides, TiO and TiO2, were accurately produced by DC magnetron sputtering using the reactive gas pulsing process. The structure and composition of these periodic TiO2/TiO/Ti stacks were investigated by X-ray diffraction and transmission electronic microscopy techniques. Two crystalline phases, hexagonal close packed Ti and face centred cubic TiO, were identified in the metallic-rich sub-layers, whereas the oxygen-rich ones comprised a mixture of amorphous TiO2 and rutile phase. DC electrical resistivity rho measured for temperatures ranging from 300 to 500 K exhibited a metallic-like behaviour (rho(473K) = 1.05 x 10(-5) to 1.4...
In the field of magnetron sputtering, it is well established that mid-frequency (20–350 kHz) pulsed ...
This paper compares titanium oxide (TiO2) thin films deposited by RF and DC sputtering. Structural c...
We present results of electrical conduction studies of Ti/TiOx/Ti planar structures prepared by tip-...
International audienceMultilayered structures with 14-50 nm periods composed of titanium and two dif...
International audienceMultilayered structures with a 40 nm period composed of titanium and two diffe...
International audiencesputtering. The reactive gas pulsing process is involved to periodically injec...
Les multicouches périodiques ont trouvé de nombreuses applications dans les domaines de l’optique, d...
Periodic multilayers have found many applications in the fields of optics, mechanics or electronics....
Titanium dioxide thin films are durable, chemically stable, have a high refractive index and good el...
TiCxOy films with various O/Ti ratios have been deposited by DC magnetron sputtering, using C pieces...
We report on the synthesis of titanium suboxide films using a magnetron sputtering setup. The struct...
Oxide-semiconductor interface quality of high-pressure reactive sputtered (HPRS) TiO2 films annealed...
Crystalline TiO2 layers could be deposited on glass and silicon substrates by reactive pulse magnetr...
International audienceDC reactive sputtering was used to deposit titanium and tungsten-based metal/o...
This paper deals with the reactive sputtering of titanium in an argon and oxygen mixture. The variat...
In the field of magnetron sputtering, it is well established that mid-frequency (20–350 kHz) pulsed ...
This paper compares titanium oxide (TiO2) thin films deposited by RF and DC sputtering. Structural c...
We present results of electrical conduction studies of Ti/TiOx/Ti planar structures prepared by tip-...
International audienceMultilayered structures with 14-50 nm periods composed of titanium and two dif...
International audienceMultilayered structures with a 40 nm period composed of titanium and two diffe...
International audiencesputtering. The reactive gas pulsing process is involved to periodically injec...
Les multicouches périodiques ont trouvé de nombreuses applications dans les domaines de l’optique, d...
Periodic multilayers have found many applications in the fields of optics, mechanics or electronics....
Titanium dioxide thin films are durable, chemically stable, have a high refractive index and good el...
TiCxOy films with various O/Ti ratios have been deposited by DC magnetron sputtering, using C pieces...
We report on the synthesis of titanium suboxide films using a magnetron sputtering setup. The struct...
Oxide-semiconductor interface quality of high-pressure reactive sputtered (HPRS) TiO2 films annealed...
Crystalline TiO2 layers could be deposited on glass and silicon substrates by reactive pulse magnetr...
International audienceDC reactive sputtering was used to deposit titanium and tungsten-based metal/o...
This paper deals with the reactive sputtering of titanium in an argon and oxygen mixture. The variat...
In the field of magnetron sputtering, it is well established that mid-frequency (20–350 kHz) pulsed ...
This paper compares titanium oxide (TiO2) thin films deposited by RF and DC sputtering. Structural c...
We present results of electrical conduction studies of Ti/TiOx/Ti planar structures prepared by tip-...