Fabrication and characterization of monolithic piezoresistive high-g three-axis accelerometer

Abstract We report piezoresistive high-g three-axis accelerometer with a single proof mass suspended by thin eight beams. This eight-beam design allows load-sharing at high-g preventing structural breakage, as well as the symmetric arrangement of piezoresistors. The device chip size is 1.4\ua0mm\ua0\ud7\ua01.4\ua0mm\ua0\ud7\ua00.51\ua0mm. Experimental results show that the sensitivity in X-, Y- and Z-axes are 0.2433, 0.1308 and 0.3068\ua0mV/g/V under 5\ua0V applied and the resolutions are 24.2, 29.9 and 25.4\ua0g, respectively