Performance of Vertically Stacked Horizontal Si Nanowires Transistors: A 3D Monte Carlo / 2D Poisson Schrodinger Simulation Study

In this paper we present a simulation study of 5nm vertically stacked lateral nanowires transistor (NWTs). The study is based on calibration of drift-diffusion results against a Poisson-Schrodinger simulations for density-gradient quantum corrections, and against ensemble Monte Carlo simulations to calibrate carrier transport. As a result of these calibrated results, we have established a link between channel strain and the device performance. Additionally, we have compared the current flow in a single, double and triple vertically stacked lateral NWTs