A programmable MEMS bandpass filter.

The design and simulation of a programmable microelectromechanical (MEMS) filter based on using coupled microresonators is described in this research. The filter consists of two mechanical resonators interconnected by a square-truss coupling spring. A special parallel-plate type geometry has been incorporated into the filter design to afford programmability capability. Both lumped parameter methods based on the use of ordinary differential equations (ODEs) and finite element methods (FEA) based on the actual three-dimensional geometry have been employed in the analysis of the filter. A MEMS based filter with a programmable bandwidth of thirty percent was achieved.Dept. of Electrical and Computer Engineering. Paper copy at Leddy Library: Theses & Major Papers - Basement, West Bldg. / Call Number: Thesis2000 .D53. Source: Masters Abstracts International, Volume: 40-03, page: 0753. Thesis (M.A.Sc.)--University of Windsor (Canada), 2001