Add to ORKGIn this paper, we present two different results of oxidation using the same electric field assisted nano-fabrication method by atomic force microscope (AFM). Experiments were performed on silicon (Si) and highly oriented pyrolytic graphite (HOPG) surfaces respectively. Raised oxide lines were formed on Si surface, whereas sunken etch grooves were got on HOPG surface after the fabrication. We conclude that different materials may form different oxide structures in the oxidation fabrication: positive structure (raised oxide line) or negative structure (etch groove). By utilizing these oxide structures reasonably we may fabricate novel nano patterns and devices
Many techniques have been applied to fabricate nanostructures via top-down approach such as electron...
[[abstract]]As a high-dielectric-constant material, hafnium oxide is one of the promising gate oxide...
Methods of complex nano-feature formations play an important role in the development of complex circ...
In this paper, we present two different results of oxidation using the same electric field assisted ...
In this paper, we present two different results of oxidation using the same electric field assisted ...
Atomic force microscopy nanolithography (AFM) is a strong fabrication method for micro and nano stru...
Field-induced oxidation has become a promising process that is capable of directly producing high-re...
In this paper, the atomic-scale structure fabrication on Si (100) substrate using atomic force micro...
ol en ct d pr n ro surface modification. Some techniques rely on mechanical (contact) interactions b...
In this letter, we investigate the fabrication of Silicon nanostructure patterned on lightly doped (...
[著者版]Nano-scale oxide patterns were fabricated on a bilayer-GaSe terminated Si(1 1 1) surface using ...
Electrochemical oxidation and etching of highly oriented pyrolytic graphite (HOPG) has been achieved...
Atomic force microscope(AFM) induced local oxidation is a versatile and promising nanofabrication pr...
This paper researched the electric field induced fabrication with atomic force microscope (AFM). Cur...
This paper introduces atomic force microscope (AFM) deposition method to fabricate nanostructures an...
Many techniques have been applied to fabricate nanostructures via top-down approach such as electron...
[[abstract]]As a high-dielectric-constant material, hafnium oxide is one of the promising gate oxide...
Methods of complex nano-feature formations play an important role in the development of complex circ...
In this paper, we present two different results of oxidation using the same electric field assisted ...
In this paper, we present two different results of oxidation using the same electric field assisted ...
Atomic force microscopy nanolithography (AFM) is a strong fabrication method for micro and nano stru...
Field-induced oxidation has become a promising process that is capable of directly producing high-re...
In this paper, the atomic-scale structure fabrication on Si (100) substrate using atomic force micro...
ol en ct d pr n ro surface modification. Some techniques rely on mechanical (contact) interactions b...
In this letter, we investigate the fabrication of Silicon nanostructure patterned on lightly doped (...
[著者版]Nano-scale oxide patterns were fabricated on a bilayer-GaSe terminated Si(1 1 1) surface using ...
Electrochemical oxidation and etching of highly oriented pyrolytic graphite (HOPG) has been achieved...
Atomic force microscope(AFM) induced local oxidation is a versatile and promising nanofabrication pr...
This paper researched the electric field induced fabrication with atomic force microscope (AFM). Cur...
This paper introduces atomic force microscope (AFM) deposition method to fabricate nanostructures an...
Many techniques have been applied to fabricate nanostructures via top-down approach such as electron...
[[abstract]]As a high-dielectric-constant material, hafnium oxide is one of the promising gate oxide...
Methods of complex nano-feature formations play an important role in the development of complex circ...