16 channel200 GHz arrayed waveguide grating based on Si nanowire waveguides

A16 channel arrayed waveguide grating demultiplexer with200 GHz channel spacing based on Si nanowire waveguides is designed. The transmission spectra response simulated by transmission function method shows that the device has channel spacing of1.6 nm and crosstalk of31 dB. The device is fabricated by193 nm deep UV lithography in silicon-on-substrate. The demultiplexing characteristics are observed with crosstalk of5-8 dB, central channel's insertion loss of2.2 dB, free spectral range of24.7 nm and average channel spacing of1.475 nm. The cause of the spectral distortion is analyzed specifically