The Analysis and Testing of MEMS and Macro Scale Piezoelectric Devices

Piezoelectric materials are incorporated into many of today's commercial and research devices. Accelerometers, crystal oscillators, sonar devices, audio transducers, igniters, position systems, and vibration absorbers are to name a few. The applications associated with piezoelectricity can be categorized into three groups: 1) sensors, 2) actuators, and 3) energy harvesters. Clark (2000), Lesieutre (2004) and Muriuki (2004) illustrate a shunt method technique that can tune the stiffness of sensors, actuators and energy harvesters. This thesis focuses on the two common designs (d31 or d33 structure) associated with the piezoelectric device applications. MEMS interdigitated electrode beams are frequency tested via µLDV and showed to be tunable. Additionally, optimal interdigitated electrode layouts are investigated and reported. A design methodology is provided to help one conclude what type of piezoelectric device should be developed