Charge-State-Resolved Ion Energy Distribution Functions ofCathodic Vacuum Arcs: A Study Involving the Plasma Potential and BiasedPlasmas

There are divergent results in the literature on the(in)dependence of the ion velocity distribution functions on the ioncharge states. Apparently, most time-of-flight methods of measurementsindicate independence whereas most measurements with electrostaticanalyzers state the opposite. It is shown here that this grouping iscoincidental with investigations of pulsed and continuous arcs. Allresults can be consolidated by taking ion-neutral interaction intoaccount, especially charge exchange collisions with the metal neutralsproduced by the arc itself. The velocity distribution functions areindependent of charge state when produced at cathode spots but becomecharge-state dependent when the plasma interacts withneutrals