A machining parameter study to select best conditions for SPDT of large single-crystal silicon optics

The interdependence of process parameters on diamond turning of single-crystal silicon is poorly understood. An experimental design technique based on methods of statistical analysis permits the determination of a specific parameter's influence and its co-dependence on other factors. This design technique enables the creation of an experimental matrix, considering all input parameters (surface velocity; feed rate; depth of cut; tool radius; tool rake/skew angle; cutting fluid), while substantially decreasing the overall number of experiments. After an initial survey the significant parameters for a subsequent response surface methodology (RSM) study can be selected. From measurements of tool wear, surface finish and sub-surface damage (SSD) the optimum parameter settings for the diamond turning process can then be determined