Reflectance Spectroscopy: Rapid Quantitative Measurements in Commercial Production of Si Solar Cells

The reflectance spectrum of a wafer/solar cell is used to measure physical parameters of the wafer and its structural components and interfaces. New applications of the reflectometer have been developed, which enable determination of the average parameters over the entire wafer/cell, as well as their spatial mapping. Measurements can be made in less than 100 ms. This method is well suited for commercial monitoring of solar cell processing