Add to ORKGThis paper presents in-situ measurement results for energy and environmental performance of thirteen cleanroom systems located in the USA, including key metrics for evaluating cleanroom air system performance and overall electric power intensity. Comparisons with the IEST Recommended Practice (IEST-RP-CC012.1) are made to examine the performance of cleanroom air systems. Based upon the results, the paper discusses likely opportunities for improving cleanroom energy efficiency while maintaining effective contamination control. The paper concludes that there are wide variations in energy performance of cleanroom environmental systems, and that performance benchmarking can serve as a vehicle to identify energy efficient cleanroom design practi...
The high Air Change Rates (ACRs) required for cleanrooms makes them energy intensive. This research ...
In cleanrooms, high ventilation rates are being used. This is in line with the available guidelines....
The use of cleanrooms is increasing and the expectation is that this growth will continue in the com...
A utility market transformation project studied energy use and identified energy efficiency opportun...
Cleanrooms are among the most energy-intensive types of facilities. This is primarily due to the cle...
Cleanrooms, critical to a wide range of industries, universities, and government facilities, are ext...
Facility managers and designers know their buildings are energy intensive yet have few techniques to...
A high-performance cleanroom should provide efficient energy performance in addition to effective co...
Abstract Cleanrooms, critical to a wide range of industries, universities, and government facilities...
Based on a review of airflow design factors and in-situ energy measurements in ISO Cleanliness Class...
Buildings with cleanrooms and laboratories are growing in terms of total floor area and energy inten...
The paper presents results of laboratory-measured performance of fan-filter units (FFUs) used for c...
Non-unidirectional airflow cleanrooms are supplied with filtered air to minimise the contamination ...
A minienvironment is a localized environment created by an enclosure to isolate a product or process...
The biggest factor affecting cleanroom initial and operating (energy) cost is the airflow rate. And ...
The high Air Change Rates (ACRs) required for cleanrooms makes them energy intensive. This research ...
In cleanrooms, high ventilation rates are being used. This is in line with the available guidelines....
The use of cleanrooms is increasing and the expectation is that this growth will continue in the com...
A utility market transformation project studied energy use and identified energy efficiency opportun...
Cleanrooms are among the most energy-intensive types of facilities. This is primarily due to the cle...
Cleanrooms, critical to a wide range of industries, universities, and government facilities, are ext...
Facility managers and designers know their buildings are energy intensive yet have few techniques to...
A high-performance cleanroom should provide efficient energy performance in addition to effective co...
Abstract Cleanrooms, critical to a wide range of industries, universities, and government facilities...
Based on a review of airflow design factors and in-situ energy measurements in ISO Cleanliness Class...
Buildings with cleanrooms and laboratories are growing in terms of total floor area and energy inten...
The paper presents results of laboratory-measured performance of fan-filter units (FFUs) used for c...
Non-unidirectional airflow cleanrooms are supplied with filtered air to minimise the contamination ...
A minienvironment is a localized environment created by an enclosure to isolate a product or process...
The biggest factor affecting cleanroom initial and operating (energy) cost is the airflow rate. And ...
The high Air Change Rates (ACRs) required for cleanrooms makes them energy intensive. This research ...
In cleanrooms, high ventilation rates are being used. This is in line with the available guidelines....
The use of cleanrooms is increasing and the expectation is that this growth will continue in the com...