Energetic Deposition in Vacuum

In hoping to improve Niobium deposition on Copper cavity, a vacuum deposition system has been built to test the idea of Nb energetic condensation on copper substrate. The system directly uses microwave power to create the pure Nb plasma, which can be used to extract energetic Nb ion flux to do direct deposition on copper substrate. In this paper, we briefly describe the system, discuss the potential benefit of this technique and report the initial result of Nb plasma creation and Niobium thin film deposition