Add to ORKGThe transmission of mechanical power is often accomplished through the use of gearing. The recently developed surface micromachined microengine provides us with an actuator which is suitable for driving surface micromachined geared systems. In this paper we will present aspects of the microengine as they relate to the driving of geared mechanisms, issues relating to the design of micro gear mechanisms, and details of a design of a microengine-driven geared shutter mechanism
A surface micromachining process is presented which has been used to fabricate electrostatic microac...
Electric micromotors are sub-millimeter sized actuators capable of unrestrained motion in at least o...
The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of t...
A microengine uses two synchronized linear actuators as a power source and converts oscillatory moti...
Several authors have given overviews of microelectromechanical systems, including microactuators. In...
Several authors [1,2] have given overviews of microelectromechanical systems, including microactuato...
In this paper a surface micromachining process is presented which has been used to fabricate electro...
Quad-level polysilicon surface micromachining technology, comprising three mechanical levels plus an...
Abstract: The trend to miniaturization cannot be overseen. The use of very small electronic and elec...
The description relates to a micromechanical device consisting of a cogwheel mounted in a rotating b...
A technique is described for micropositioning a surface forces apparatus with low mechanical and the...
The Micro Harmonic Drive ® gear is now established in the precision machine market as an ideal solut...
Nowadays many consumer electronic devices are using small engines (micromotors). Thanks to technolog...
Abstract. This paper reports on the development of a new technology intended for the wafer level fab...
Microelectromechanical engines that convert the linear outputs from dual orthogonal electrostatic ac...
A surface micromachining process is presented which has been used to fabricate electrostatic microac...
Electric micromotors are sub-millimeter sized actuators capable of unrestrained motion in at least o...
The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of t...
A microengine uses two synchronized linear actuators as a power source and converts oscillatory moti...
Several authors have given overviews of microelectromechanical systems, including microactuators. In...
Several authors [1,2] have given overviews of microelectromechanical systems, including microactuato...
In this paper a surface micromachining process is presented which has been used to fabricate electro...
Quad-level polysilicon surface micromachining technology, comprising three mechanical levels plus an...
Abstract: The trend to miniaturization cannot be overseen. The use of very small electronic and elec...
The description relates to a micromechanical device consisting of a cogwheel mounted in a rotating b...
A technique is described for micropositioning a surface forces apparatus with low mechanical and the...
The Micro Harmonic Drive ® gear is now established in the precision machine market as an ideal solut...
Nowadays many consumer electronic devices are using small engines (micromotors). Thanks to technolog...
Abstract. This paper reports on the development of a new technology intended for the wafer level fab...
Microelectromechanical engines that convert the linear outputs from dual orthogonal electrostatic ac...
A surface micromachining process is presented which has been used to fabricate electrostatic microac...
Electric micromotors are sub-millimeter sized actuators capable of unrestrained motion in at least o...
The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of t...