Synchrotron radiation and precision mirror metrology with a long trace profiler

The Long Trace Profiler (LTP) is in use at several synchrotron radiation (SR) laboratories throughout the world and by a number of manufacturers who specialize in making grazing incidence mirrors for SR customers. Recent improvements in the design and operation of the LTP system have reduced the slope profile error bar to the level of 0.3 microradians RMS over measurement lengths of 0.5 meter. This corresponds to a height error bar on the order of 20 nanometers. This level of performance allows one to measure with confidence the shape of large cylinders and spheres that have kilometer radii of curvature in the axial direction. The LTP is versatile enough to make measurements of a mirror in the face up, sideways, and face down configurations. The authors will illustrate the versatility of the current version of the instrument, the LTP II, and present results from two new versions of the instrument: the in-situ LTP (ISLTP) and the Vertical Scan LTP (VSLTP). Both of them are based on the penta-prism LTP (ppLTP) principle with a stationary optical head and moving penta-prism. The ISLTP is designed to measure the distortion of high heat load mirrors during actual operation in SR beam lines. The VSLTP is designed to measure the complete 3-dimensional shape of x-ray telescope cylinder mirrors and mandrels in a vertical configuration. Scans are done both in the axial direction and in the azimuthal direction