Dynamics of electronegative plasmas for materials processing. Final report

Purpose was to study equilibrium particle and energy balance and heating mechanisms in electronegative rf discharges. Attention is given to formation of non-Maxwellian electron distributions and their effect on macroscopic parameters. Research includes theory, particle- in-cell simulation, and experimental investigations. Sheath heating theory and simulation results for electropositive plasmas are used as guide. The investigation was centered on, but not limited to, study of oxygen feedstock gas in capacitively and inductively coupled rf discharges