Add to ORKGAn analytical solution for large deflections of a clamped circular diaphragm with built-in stress is presented. The solution is directly applicable to micromachined pressure sensors. The solution is compared to finite element analysis results and experimental data from a surface-micromachined pressure sensor
This paper describes the power series solution for modelling of the simply supported circular diaphr...
This paper describes the power series solution for modelling of the simply supported circular diaphr...
The demand for micromachined solid-state pressure sensors has been escalating in many fields. Resear...
An analytical solution for large deflections of a clamped circular diaphragm with built-in stress is...
It is known that the deflection of a diaphragm is determined by two mechanisms, bending moments or b...
In this paper, an analytical and simulation solution for touch mode Micro-electromechanical systems ...
A method is presented for the accurate determination of the deflection of diaphragms commonly used f...
MEMS offer different fabrication process to fabricate diaphragms in various applications such as mic...
A surface micromachined pressure sensor array has been designed and fabricated. The sensors are base...
Diaphragm pressure sensors based on silicon micromachining have advantages of small size and integra...
This paper deals with the characteristics of circular shaped polysilicon pressure sensor diaphragms ...
This paper presents comprehensive guidelines for the design and analysis of a thin diaphragm that is...
Mechanical hysteresis problems associated with pressure sensors based on interferometric measurement...
A surface micromachined pressure sensor array has been designed and fabricated. The sensors are base...
The influence of diaphragm bending stiffness distribution on the stress concentration characteristic...
This paper describes the power series solution for modelling of the simply supported circular diaphr...
This paper describes the power series solution for modelling of the simply supported circular diaphr...
The demand for micromachined solid-state pressure sensors has been escalating in many fields. Resear...
An analytical solution for large deflections of a clamped circular diaphragm with built-in stress is...
It is known that the deflection of a diaphragm is determined by two mechanisms, bending moments or b...
In this paper, an analytical and simulation solution for touch mode Micro-electromechanical systems ...
A method is presented for the accurate determination of the deflection of diaphragms commonly used f...
MEMS offer different fabrication process to fabricate diaphragms in various applications such as mic...
A surface micromachined pressure sensor array has been designed and fabricated. The sensors are base...
Diaphragm pressure sensors based on silicon micromachining have advantages of small size and integra...
This paper deals with the characteristics of circular shaped polysilicon pressure sensor diaphragms ...
This paper presents comprehensive guidelines for the design and analysis of a thin diaphragm that is...
Mechanical hysteresis problems associated with pressure sensors based on interferometric measurement...
A surface micromachined pressure sensor array has been designed and fabricated. The sensors are base...
The influence of diaphragm bending stiffness distribution on the stress concentration characteristic...
This paper describes the power series solution for modelling of the simply supported circular diaphr...
This paper describes the power series solution for modelling of the simply supported circular diaphr...
The demand for micromachined solid-state pressure sensors has been escalating in many fields. Resear...