Add to ORKGIn conjunction with our experimental work on saddle field ion sputtering, we have attempted to apply the Monte Carlo program TRIM (Transport of Ions in Matter) to calculate the sputter yields for a variety of noble gas sputtering applications. Comparison with experiments are shown. Information extracted from these analyses have proved useful in optimizing the experimental sputtering parameters. Calculated sputter yields obtained utilizing TRIM are presented for noble gas sputtering of a variety of materials common to nuclear target production
Sputtering yields have been measured for neon, argon and krypton sputtering of gold and for argon an...
The angular distributions of sputtered atoms at large angle oblique and grazing incidence of the pri...
30 keV Ar+ and Kr+ ion bombardment. It is found that Ag exhibits a weaker angular dependence, though...
This paper presents a zero order approximation of ion collection during sputtering. Neglecting diffu...
Sputtering of monocrystalline metals by light noble gas ions is studied experimentally and theoretic...
This report gives an overview of available calculated sputtered energy coeffi-cients of energetic io...
Sputtering of spacecraft surfaces by energetic xenon ions in the plumes of Hall thrusters is a prima...
The Monte Carlo program TRIM.SP (version trvmcmom) was applied to calculate sputtering yields, refle...
A discussion is presented concerning the method of setting up a saddle field ion source for sputteri...
AbstractThe formation process of M2+ molecular ions sputtered from elementary target materials is in...
We have measured the yields of 90 keV ^(40)Ar^+ and ^4He^+ sputtering of Mo and V samples by the use...
The non-monotonous dependence of the total sputtering yield on the projectile atomic number, which i...
Exit-angle resolved Mo atom sputtering yield under Xe ion bombardment and carbon atom and cluster (C...
The properties of sputtered and scattered ions are studied for ion beam sputtering of Si by bombardm...
Ion sputtering is the removal of surface atoms or molecules in a solid under energetic ion irradiati...
Sputtering yields have been measured for neon, argon and krypton sputtering of gold and for argon an...
The angular distributions of sputtered atoms at large angle oblique and grazing incidence of the pri...
30 keV Ar+ and Kr+ ion bombardment. It is found that Ag exhibits a weaker angular dependence, though...
This paper presents a zero order approximation of ion collection during sputtering. Neglecting diffu...
Sputtering of monocrystalline metals by light noble gas ions is studied experimentally and theoretic...
This report gives an overview of available calculated sputtered energy coeffi-cients of energetic io...
Sputtering of spacecraft surfaces by energetic xenon ions in the plumes of Hall thrusters is a prima...
The Monte Carlo program TRIM.SP (version trvmcmom) was applied to calculate sputtering yields, refle...
A discussion is presented concerning the method of setting up a saddle field ion source for sputteri...
AbstractThe formation process of M2+ molecular ions sputtered from elementary target materials is in...
We have measured the yields of 90 keV ^(40)Ar^+ and ^4He^+ sputtering of Mo and V samples by the use...
The non-monotonous dependence of the total sputtering yield on the projectile atomic number, which i...
Exit-angle resolved Mo atom sputtering yield under Xe ion bombardment and carbon atom and cluster (C...
The properties of sputtered and scattered ions are studied for ion beam sputtering of Si by bombardm...
Ion sputtering is the removal of surface atoms or molecules in a solid under energetic ion irradiati...
Sputtering yields have been measured for neon, argon and krypton sputtering of gold and for argon an...
The angular distributions of sputtered atoms at large angle oblique and grazing incidence of the pri...
30 keV Ar+ and Kr+ ion bombardment. It is found that Ag exhibits a weaker angular dependence, though...