Defects and their origin in thin films of (001) alkaline earth oxides

MgO is used as an optical isolation layer for waveguides epitaxially grown on Si. Crystalline perfection of MgO is critical because it serves as a substrate for the single crytal, perovskite guiding layer. Imperfections in the MgO will result in imperfections in the guiding layer and lead to large optical losses for the planar waveguide structure. It is shown that the most common defect to form in thin MgO films are twin boundaries between {l_brace}111{r_brace}-type planes. Highest density of twins is observed when (001) MgO is grown directly on silicon/MgO interlayers containing Ba. Twinning is shown to accommodate the large size of Ba impurities incorporated in the MgO films through formation of internal grain boundaries and oper surface other than the growing (001) of MgO