Preparation of multilayered materials in cross-section for in situ TEM tensile deformation studies

The success of in-situ transmission electron microscopy experimentation is often dictated by proper specimen preparation. We report here a novel technique permitting the production of cross-sectioned tensile specimens of multilayered films for in-situ deformation studies. Of primary importance in the development of this technique is the production of an electron transparent micro-gauge section using focused ion beam technology. This microgauge section predetermines the position at which plastic deformation is initiated; crack nucleation, growth and failure are then subsequently observed