The Design and Fabrication of High Efficient 1000℃ Heater

[[abstract]]隨著台灣半導體產業的蓬勃發展，成為帶動台灣整體經濟成長最重要的產業，每年為台灣帶來可觀的高額產值，截至今日，半導體仍然是台灣的龍頭產業、經濟發展的重要指標。半導體業更儼然成為維繫國家經濟動脈的一個主力，半導體製造為一垂直分工細密且高附加價值的產業，其快速的成長也會帶動其他週邊產業的繁榮。 由於半導體元件製程中，使用多種酸鹼溶液、有機溶劑及特殊毒 性氣體，其製程中衍生之廢液、廢水、廢氣等問題後段的處理設備，就必須達到高效能處理。 本研究製作高效率的電熱絲最主要的目的是在系統中的反應爐提供熱能，電熱絲所產生的熱能則是用來反應沉積與清洗過程後，所產生的製程癈氣，加上適當的比例的氧氣後加熱，在反應爐產生功率，利用溫度控制器提供一個0V~25V的訊號去控制SSR的輸出電流，維持反應爐內固定的溫度。以電阻式加熱法進行廢氣處理，達到處理高效果將製程廢氣反應的更乾淨。[[abstract]]The rapid development of the semiconductor industry has made it the most important industry that driving overall economic growth in Taiwan. Every year, the industry adds significantly to production in Taiwan. Currently, semiconductors remain the top industry in Taiwan and it is an important index for economic development. The semiconductor industry is major driver for the national economy. Semiconductor manufacturing is an industry that has vertical specialization with high levels of precision that adds extra value. The rapid growth of the semiconductor industry will continue to drive prosperity for peripheral industries. Various acids, alkali solutions, organic solvent, and other toxic gases are by products of the manufacturing process for semiconductor components. The processing equipment for waste liquid, wastewater, and waste gas from this process should be capable of handling these high-performance processes well. The main objective for high efficiency heating wire produced in this study is to provide heat energy for reaction furnaces. Heating wires are used in reactions for the waste gas produced by the process, which includes the deposition and cleaning process, in terms of the heat energy generated by them. After adding an appropriate amount of oxygen, waste gases are heated and power is generated in the reaction furnace. A signal of 0 V–25 V is used to control the output SSR current to maintain a fixed temperature in the reaction furnace via the temperature controller. A resistive heating method is used to perform waste gas treatments to achieve high performance processes and a cleaner reaction process for the waste gases produced by the manufacturing process.[[note]]碩