Synthesis of Cu Nanoparticles in Al2O3 by Ion Implantation and Subsequent Laser Annealing

Al2O3 samples with Cu nanoparticles synthesised by ion implantation at 40 keV, with a dose of 1x10**17 ion/cm2 and a current density from 2.5 to 12.5 μA/cm2 were annealed using several pulses from a KrF excimer laser with a single pulse fluence of 0.3 J/cm2. The copper depth distribution, formation and modification of metal nanoparticles under the ion implantation and laser treatment were studied by Rutherford backscattering (RBS), energy dispersive X-ray (EDX) analysis, atomic force microscopy (AFM) and optical spectroscopy. The metal nucleation, the change in particle size and the possibility for oxidation of the copper particles are examined in the framework of Mie theory