222,623 4,894,537 Ho1J 37/00 H01L 41/09 (20060101) United States

A novel scanning tunneling microscope (STM) is described which is constructed almost entirely of one metal e.g. aluminum and uses bimorph piezoelectric disks as the x, y, z drive elements. The design uses a simple, rugged tirpod configuration for the fine motion drive arms. Coarse motion of the sample, which is mounted on an aluminum holder, is achieved by pushing, or pulling, with a piezoelectric louse. Differential thermal expansion effects are avoided by design, to first order, and the resulting drift is .ltoreq.0.5 .ANG. per minute after only a short warm-up period. It is easy to build and operate, and has good immunity to mechanical vibrations