07/222,623 1,298,416 H01J 37/00 (2006.01) H01L 41/09 (2006.01) Canada

A novel scanning tunneling microscope (STM) is described which is constructed almost entirely of one metal e.g. aluminum and uses bimorph piezoelectric disks as the x, y, z drive elements. The design uses a simple, rugged tripod configuration for the fine motion drive arms. Coarse motion of the sample, which is mounted on an aluminum holder, is achieved by pushing, or pulling, with a piezoelectric louse. Differential thermal expansion effects are avoided by design, to first order,and the resulting drift is ? 0.5 .ANG. per minute after only a short warm-up period. It is easy to build and operate, and has good immunity to mechanical vibration