Ionization chambers are widely used for measuring tritium in the gas phase. Recently, however, it has been perceived that the contamination of the chamber wall due to the adsorption of tritium significantly impairs the reliability of the ionization chambers when they are used for measuring tritium at high concentrations. As a first step to overcome this difficulty, we studied the contamination of ionization chambers with tritium gas (HT) and/or tritiated water vapor (HTO) by using different component materials (Cu, Ni-plated, and Au-plated chambers). In case of the Cu chamber, the concentration of tritium gas in the chamber decreased exponentially with time due to purge by fresh air to a certain level. Then, the decrease rate slowed down dr...