Use of Sputtered Multilayers in a Double-crystal Monochromator

We report on the use of synthetic multilayers as diffracting elements in the double-crystal monochromator of an X-ray beamline to obtain focused, monochromatized synchrotron radiation below 1000 eV. A resolving power \u3e 100 (ElΔE) was observed at the fluorine K edge (690 eV) and the copper L2.3 edges (930–950 eV) as demonstrated by absorption spectra of thin films