A comparative study of metal-semiconductor-metal photodetectors on GaAs with indium-tin-oxide and Ti/Au electrodes

[[abstract]]Metal-semiconductor-metal (MSM) photodiodes with interdigitated indium-tin-oxide (ITO) electrodes have been fabricated on undoped GaAs using reactive-ion-etching in a methane plasma. The responsivity of ITO MSMs is measured to be approximately 0.8 A/W, which is twice that of conventional Ti/Au MSMs under normal operational bias conditions at λ=850 nm. This higher responsivity is attributed to the transparency of the ITO electrodes. ITO MSMs exhibited a linear optical response over a wider bias range than Ti/Au MSMs. Also, a higher breakdown voltage was measured for ITO MSMs. The bandwidths of ITO and Ti/Au MSMs fabricated on the same semiconductor layer with 1-μm fingers and spaces were measured to be 6 and 9 GHz, respectively. The slower response of the ITO MSMs is due to the longer transit time of the carriers generated beneath the ITO electrodes[[fileno]]2030161010131[[department]]電機工程學