Measuring interface strains at the atomic resolution in depth using x-ray Bragg-surface diffraction

[[abstract]]A generic x-ray diffraction method, using three-wave Bragg-surface diffraction, is developed to measure strains at the interface of molecular beam epitaxial Au/GaAs(001), where grazing-incidence diffraction cannot be applied due to the difference in refractive index between Au and GaAs. Changes in diffraction images of the surface reflection (1–13) of GaAs(006)/(1–13) three-wave Bragg-surface diffraction and the (–1–13) of GaAs(006)/(–1–13) at different azimuth and Bragg angles give the depth penetration of 2 Å resolution and variations of lattice constant, –49%, –27%, and 2%, along the surface normal [001] and in-plane directions [–1–10] and [1–10] within the depths of 18, 72, and 72 Å, respectively.[[fileno]]2010105010099[[department]]物理