Comparative measurements of the piezoelectric coefficient of a lead zirconate titanate film by piezoresponse force microscopy using electrically characterized tips

[[abstract]]We report comparative measurements of the piezoelectric coefficient d(33) of a lead zirconate titanate (PZT) film by piezoresponse force microscopy based on tip/PZT/electrode and tip/electrode/PZT/ electrode configurations. With the use of electrically characterized Au-coated tips, the obtained values are in good agreement and indicate a negligible methodological effect. It is concluded that the d(33),can be reasonably determined without the use of a top electrode as long as the electrical quality of the tip is qualified. (C) 2003 American Vacuum Society. [DOI: 10.1116/1.1562644].[[fileno]]2020316010021[[department]]材料