[[abstract]]A bending beam technique with the use of two substrates, silicon and gallium arsenide, has been successfully employed to simultaneously determine the biaxial relaxation modulus, Ef/(1 - νf), and thermal expansion coefficient, αf , of a rigid rod‐like polyimide film, pyromellitic dianhydride‐benzidine (PMDA‐B) coated on a substrate. As measured, the two properties, especially αf , significantly increase with the increase of film thickness. At 150 °C, for example, the obtained Ef(1 - νf) increases from 6.0 to 8.2×109 N/m2, and αf from -0.33 to 2.42×10-6/°C for thicknesses ranging from 10 to 30 μm.[[fileno]]2020306010062[[department]]材料
With the advancements in microelectronic industry and extensive use of thin films in the micro-devic...
[[abstract]]The diffusion of NMP (n-methyl-pyrrolidinone) solvent in a semirigid rod-like PMDA-ODA (...
Five transparent polyimide thin films with different proportions of 1,2,4,5-,pyromellitic dianhydrid...
[[abstract]]A bending-beam technique with the use of two different substrates, silicon and gallium a...
This dissertation presents an investigation of the mechanical, thermal, and physical properties of p...
[[abstract]]The stress in films of semirigid and rigid polyimides (PIs) on silicon (Si) substrate ha...
The rapid growth of microelectromechanical systems (MEMS) industry has introduced a need for the cha...
High-temperature applications of microelectromechanical systems (MEMS), especially in new temperatur...
The rapid growth of microelectromechanical systems (MEMS) industry has introduced a need for the cha...
High-temperature applications of microelectromechanical systems (MEMS), especially in new temperatur...
The overall goals of this research were to establish better selection criteria for the use of polyme...
Results of in situ measurements of the thermomechanical properties of polyimides used in the microel...
[[abstract]]A theoretical model, correlating the bending curvature variation ratio of a layered stru...
Multilayer poly(p-phenylene biphenyltetracarboximide) (BPDA-PDA) polyimide films of 172-mu-m total t...
With the advancements in microelectronic industry and extensive use of thin films in the micro-devic...
With the advancements in microelectronic industry and extensive use of thin films in the micro-devic...
[[abstract]]The diffusion of NMP (n-methyl-pyrrolidinone) solvent in a semirigid rod-like PMDA-ODA (...
Five transparent polyimide thin films with different proportions of 1,2,4,5-,pyromellitic dianhydrid...
[[abstract]]A bending-beam technique with the use of two different substrates, silicon and gallium a...
This dissertation presents an investigation of the mechanical, thermal, and physical properties of p...
[[abstract]]The stress in films of semirigid and rigid polyimides (PIs) on silicon (Si) substrate ha...
The rapid growth of microelectromechanical systems (MEMS) industry has introduced a need for the cha...
High-temperature applications of microelectromechanical systems (MEMS), especially in new temperatur...
The rapid growth of microelectromechanical systems (MEMS) industry has introduced a need for the cha...
High-temperature applications of microelectromechanical systems (MEMS), especially in new temperatur...
The overall goals of this research were to establish better selection criteria for the use of polyme...
Results of in situ measurements of the thermomechanical properties of polyimides used in the microel...
[[abstract]]A theoretical model, correlating the bending curvature variation ratio of a layered stru...
Multilayer poly(p-phenylene biphenyltetracarboximide) (BPDA-PDA) polyimide films of 172-mu-m total t...
With the advancements in microelectronic industry and extensive use of thin films in the micro-devic...
With the advancements in microelectronic industry and extensive use of thin films in the micro-devic...
[[abstract]]The diffusion of NMP (n-methyl-pyrrolidinone) solvent in a semirigid rod-like PMDA-ODA (...
Five transparent polyimide thin films with different proportions of 1,2,4,5-,pyromellitic dianhydrid...