Dynamics and control of high precision magnetically levitated vibration isolation systems

[[abstract]]The relationships between actuator and sensor locations and control characteristics of a magnetically levitated vibration isolation system are investigated. The problem is formulated using orthogonal mode shape functions based on the Rayleigh-Ritz method. A lumped-parameter model of a flexible vibration isolation table top is used to investigate the system's controllability and observability including the coupling effects of the magnetic bearing. The instability caused by the magnetic bearing dynamics is also studied. The selection of proper actuator and sensor locations leading to a controllable and observable system is discussed. Necessary and sufficient conditions are derived for proper selection of actuator and sensor locations, and for reducing the controller complexity. The results are illustrated by examples using approximate mode shape functions. Such information is important for the overall design of ultra-high-performance vibration isolation systems[[fileno]]2020219010009[[department]]動機