Novel two-dimensional micromachined accelerometer based on thermocapillary heat transfer

[[abstract]]We report a novel prototype of a two-dimensional micromachined accelerometer based on thermocapillary heat transfer. The only moving element in this accelerometer is a thermal bubble generated by vaporizing the working liquid in the microchamber. The accelerometer consists of two key components, a heating resistor for creating symmetrical temperature profiles and two pairs of temperature detectors placed symmetrically and orthogonally to each other. The prototype devices demonstrate that a sensitivity of 1.5 degrees C/g for an operating power of 60 mW can be realized. The frequency response of the accelerometer containing deionized water is 200 Hz, and the corresponding noise equivalent acceleration is similar to 1 mg/Hz(1/2). (C) 2008 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.2959849][[fileno]]2020205010018[[department]]動機