A new fabrication of highly dense electromagnetic field microactuators and microoptics for MOEMS applications

[[abstract]]A novel concept of perpendicular magnetic anisotropy is applied to electromagnetic micro-optical switch (EMOS). In the study, Fe/Pt equiatomic alloy thin film is potential high-density recording media and high-energy permanent magnetic because of their exceptional magnetic properties. EMOS combines of new type Fe/Pt alloy thin film, innovative design of closed magnetic circuit and single layer planar coil. The Fe/Pt alloy thin film and magnetic circuit with close loop is applied to concentrate the magnetic flux, increase magnetic force, and decrease switching time. In this EMOS, some important features are summarized as follows: (1) high magnetic force (>68mN); (2) low work voltage ( less than or equal 5V); and (3) short switching time ( less than or equal 0.4ms). The work demonstrates that EMOS can provide excellent performance than conventional magnetic microactuator.[[fileno]]2060122030005[[department]]工程與系統科學