Process Capability Analysis in Semiconductor Manufacturing

[[abstract]]Recently, product yield has become an important index for evaluating semiconductor industry firm capabilities. Yield can be influenced by numerous factors including product characteristics, manufacturing processes, equipment stability, environmental variations, and so on. Among these factors, equipment stability is closely related to product quality. Consequently, monitoring the process capabilities to ensure equipment stability and product quality has become extremely important in semiconductor fabs. This study proposes a new model for evaluating equipment process capability to more closely reflect process status. First, the process data are analyzed and segmented according to their specific data distribution. Each data segment then is fitted into an approximation distribution function. The process capability then can be correctively evaluated based on these approximation distribution functions. The experimental results demonstrate that the proposed approach could avoid the besetments and mistakes that generally affect traditional methods.[[fileno]]2020408010014[[department]]工工