[[abstract]]©2000 IEEE - We describe a quadruple Michelson heterodyne interferometer for measuring longitudinal displacement, pitch, and yaw of a target mirror relative to a stationary one. A Fabry-Perot interferometer provides independent control of systematic errors[[fileno]]2060206030003[[department]]醫環
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate pos...
We develop a self-mixing interferometer capable of measuring the position (with halfwavelength resol...
[[abstract]]©2005 SPIE - The interferometers which measure the displacement parallel to the measurem...
A new arrangement of interferometers allows to measure the movement of a retroreflector in space wit...
[[abstract]]A laser interferometer system based on three design principles, the heterodyne frequency...
International audienceWe propose a method of displacement control that addresses the measurement req...
A computer control for a Sandercock-type multipath tandem Fabry-Perot interferometer is described, w...
This research develops a three degrees of freedom (DOF) measurement system by integrating Fabry-Pero...
A compact, balanced, up to three degrees of freedom measuring interferometer which enables fiber del...
In most length?measuring interferometers, the measuring retroreflector must move along a straight li...
The Laser Interferometer Gravitational-Wave Observatory (LIGO) and the Laser Interferometer Space An...
We present the design, implementation, and characterization of a heterodyne laser interferometer fo...
International audienceA versatile fiber interferometer was proposed for high precision measurement. ...
In order to achieve nanometer accuracy, metrologists need to identify the sources of error...
A heterodyne interferometer and a data acquiring algorithm have been developed to measure the moveme...
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate pos...
We develop a self-mixing interferometer capable of measuring the position (with halfwavelength resol...
[[abstract]]©2005 SPIE - The interferometers which measure the displacement parallel to the measurem...
A new arrangement of interferometers allows to measure the movement of a retroreflector in space wit...
[[abstract]]A laser interferometer system based on three design principles, the heterodyne frequency...
International audienceWe propose a method of displacement control that addresses the measurement req...
A computer control for a Sandercock-type multipath tandem Fabry-Perot interferometer is described, w...
This research develops a three degrees of freedom (DOF) measurement system by integrating Fabry-Pero...
A compact, balanced, up to three degrees of freedom measuring interferometer which enables fiber del...
In most length?measuring interferometers, the measuring retroreflector must move along a straight li...
The Laser Interferometer Gravitational-Wave Observatory (LIGO) and the Laser Interferometer Space An...
We present the design, implementation, and characterization of a heterodyne laser interferometer fo...
International audienceA versatile fiber interferometer was proposed for high precision measurement. ...
In order to achieve nanometer accuracy, metrologists need to identify the sources of error...
A heterodyne interferometer and a data acquiring algorithm have been developed to measure the moveme...
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate pos...
We develop a self-mixing interferometer capable of measuring the position (with halfwavelength resol...
[[abstract]]©2005 SPIE - The interferometers which measure the displacement parallel to the measurem...
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