[[abstract]]©2003 SPIE - A novel compact roll angular displacement measurement system based on the use of wave retarder is presented. It utilizes the technique of common-path, heterodyne interferometry to detect the phase shift caused by roll angular displacement of a wave retarder fixed on a moving system. This novel system is set up and verified both theoretically and experimentally. Demonstrated by experiments, it can measure the roll angular displacement of a moving system down to microradian over the range of a half-degree.[[fileno]]2060206010008[[department]]醫環
A real-time displacement measurement system using a sinusoidal phase modulating interferometer is pr...
International audienceA method based on a specific quasi-common-optical-path (QCOP) configuration fo...
A simple spatial phase-shifting setup that uses a tiled mirror and a cat’s-eye retroreflector is pre...
[[abstract]]©2004 Elsevier - A novel compact roll angular displacement measurement system is present...
In this paper, an optical angle sensor with a birefringent transducer for measuring angular displace...
[[abstract]]A quasicommon-path heterodyne grating interferometer for displacement measurement is pro...
The angle measurement is one of the fundamental measurement techniques required for a large number o...
We describe a new method for angular displacement measurements that is based on a Fabry-Perot inter-...
We have proposed an improved heterodyne interferometric roll measurement system with enhanced resolu...
Many error sources can affect the accuracy of displacement measuring interferometer systems. In hete...
Displacement measuring interferometry is based on measuring the Doppler frequency shift that a beam ...
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate pos...
We proposed heterodyne angle deviation interferometry (HADI) for angle deviation measurements. The p...
In this paper, we show picometer-order mechnical displacmment measurements using a heterodyne interf...
Program for Nanomedical Science and Technology/석사This study introduces the heterodyne interferometry...
A real-time displacement measurement system using a sinusoidal phase modulating interferometer is pr...
International audienceA method based on a specific quasi-common-optical-path (QCOP) configuration fo...
A simple spatial phase-shifting setup that uses a tiled mirror and a cat’s-eye retroreflector is pre...
[[abstract]]©2004 Elsevier - A novel compact roll angular displacement measurement system is present...
In this paper, an optical angle sensor with a birefringent transducer for measuring angular displace...
[[abstract]]A quasicommon-path heterodyne grating interferometer for displacement measurement is pro...
The angle measurement is one of the fundamental measurement techniques required for a large number o...
We describe a new method for angular displacement measurements that is based on a Fabry-Perot inter-...
We have proposed an improved heterodyne interferometric roll measurement system with enhanced resolu...
Many error sources can affect the accuracy of displacement measuring interferometer systems. In hete...
Displacement measuring interferometry is based on measuring the Doppler frequency shift that a beam ...
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate pos...
We proposed heterodyne angle deviation interferometry (HADI) for angle deviation measurements. The p...
In this paper, we show picometer-order mechnical displacmment measurements using a heterodyne interf...
Program for Nanomedical Science and Technology/석사This study introduces the heterodyne interferometry...
A real-time displacement measurement system using a sinusoidal phase modulating interferometer is pr...
International audienceA method based on a specific quasi-common-optical-path (QCOP) configuration fo...
A simple spatial phase-shifting setup that uses a tiled mirror and a cat’s-eye retroreflector is pre...