ELECTRON BEAM SCIENCE AND ENGINEERING --ANOMALOUS PHENOMENA INDUCED BY HIGH-ENERGY ELECTRONS

publisher[Abstract] High-energy electron microscopy has been improved from a powerful tool for both characterization and identification of the materials to an indispensable "micro-laboratory". In the laboratory, various specimen treatments have been carried out directly and precisely in the atomic scale to give new functional behavior to the materials. In the present paper, contribution of the electron channeling to various advantages of the high voltage electron microscopy is discussed, and some applications of the high voltage electron microscope "micro-laboratory", especially high-energy electron beam science and engineering, are shown on the following electron irradiation induced phenomena; a) crystalline-amorphous transition of materials, and b) foreign-atom implantation into solid materials