Robust on-machine profile measurement using a parallel mechanism　with small touching force scanning motion

研究代表者publisher研究種目：基盤研究(Ｃ); 研究期間：2009～2011; 課題番号：21560279; 研究分野：工学; 科研費の分科・細目：機械工学，知能機械学・機械システム研究成果の概要（和文）：機械部品の形状を能動的に倣い計測する空間3自由度パラレルメカニズムを開発した．低摺動ジョイントと平行リンクを用いたメカニズムと, 3次元画像計測装置を用いた位置精度評価装置を設計試作し, 機構キャリブレーション方法を考案した．冗長駆動を用いたパラレルメカニズムにおいて, 動作範囲1.6mm立方体内で分解能0.5μm, 絶対位置精度2.4μmを実現した．インピーダンス制御に基づく倣い制御を提案し安定した倣い制御を実現した． 研究成果の概要（英文）：A 3-dof active scanning probes using non-redundantly and redundantly actuated translational parallel mechanisms are developed. In order to improve the positioning accuracy and controlling small forces, a small parallelogram linkage with low friction joint is developed. We have developed 3D measurement system by stereo cameras for evaluating the accuracy of the parallel mechanisms. The positional resolution of the redundantly actuated mechanism becomes 0.5 μm in a cubic working range with side length of 1.6 mm. By applying mechanical parameters calibration, the accuracy of the absolute position of the parallel mechanism has been improved to 2.4μm. A stable scanning motion based on the impedance control is also developed