Development of VHDL-AMS Model of Micromechanical Part of MEMS Angualar Velocity Sensor

In the paper, VHDL-AMS model of micromechanical part of MEMS angular velocity sensor was developed. The developed model allows to simulate variations of Coriolis acceleration, displacement, capacity and current depending on the applied angular velocity, and also to make the functioning analysis of the device on the schematic level of computer-aided design