Elastic properties of B-C-N films grown by N2-reactive sputtering from boron carbide targets

The following article appeared in Journal of Applied Physics 114.21 (2013): 213508 and may be found at http://scitation.aip.org/content/aip/journal/jap/114/21/10.1063/1.4837655Boron-carbon-nitrogen films were grown by RF reactive sputtering from a B4C target and N2 as reactive gas. The films present phase segregation and are mechanically softer than boron carbide films (a factor of more than 2 in Young's modulus). This fact can turn out as an advantage in order to select buffer layers to better anchor boron carbide films on substrates eliminating thermally induced mechanical tensions.This work has been supported by Spanish MINECO under contracts MAT2009-08786 and MAT2012-37276- C03-01 as well as by the Madrid Regional Government though contract S2009/MAT-1756