Fabricate and Characterization of SrTiO3-based MIM capacitors

The conventional method uses the stoichiometric mixture of metallic oxides to synthesize polycrystalline SrTiO3. The SrTiO3 was prepared by spin coating to fabricate Metal-Insulator-Matel (MIM) aluminum-SrTiO3 film-aluminum. The cubic structure of the prepared thin film of SrTiO3 was confirmed by X-ray diffraction analysis. Strontium Titanate was deposited on silicon substrates. Studying the effect of the film thickness on the structural and electrical properties. The surface morphology of deposited thin films was studied using a scanning electron microscope. Electrical properties for SrTiO3 films at constant frequency were measured. The electrical conductivity decreases with increasing thickness. The behavior of (capacitance- Frequency) at different thicknesses was discussed. It is noted that the dielectric constant decreases with increasing frequency for all films, and the dielectric constant increases as thickness increases