Silicon Based Microactuators for Telerobotic Tactile Stimulation

Silicon based microelectromechanical (MEM) devices using both surface and bulk micromachining have been realized to provide tactile stimulation. The bulk MEM devices utilize the bimorph principle and are fabricated in a complementary metal oxide semiconductor (CMOS) process through MOS implementation system (MOSIS). The surface MEM devices utilize the electrostatic principle and are fabricated in a complementary metal oxide semiconductor (CMOS) process through MOS implementation system (MOSIS). The surface MEM devices utilize the electrostatic principle and are fabricated in the multi-user MEM process (MUMPS) through MCNC. Eleven major designs are presented and tested to determine if they are suitable to provide tactile stimulation. The bimorph and electrostatic designs were tested using a probe station, a laser interferometer, and a force tester. Measurements were taken on the deflections, cutoff frequencies, and loaded operation of the devices. The bimorph designs fabricated in the CMOS process showed the most potential. The tests results indicate that the cantilever beam designs deflect over 30 µm. They operate at frequencies below 130 Hz. The devices operate under a load of approximately 5 µN. An endurance test was performed by actuating a device over 2.5 million times