International audienceStructural and ellipsometric study on tailored optical properties of tantalum oxynitride films deposited by reactive sputtering Angélique Bousquet, Fadi Zoubian, Joël Cellier et al
The main purpose of this work is to present and to interpret the change of structure and physical pr...
International audienceThis paper reports on the first study of structural and optical properties of ...
Tantalum oxynitride thin films have been deposited by reactive magnetron sputtering, using a fixed p...
Le système antireflet (SAR) est d‟une grande importance pour les cellules photovoltaïques (PV), surt...
International audienceSilicon oxynitride thin films were sputter deposited by the reactive gas pulsi...
In a single process run, an amorphous silicon oxynitride layer was grown, which includes the entire ...
International audienceOxynitride materials, which offer the possibility of merging oxide and nitride...
An original reactive sputtering method, namely the reactive gas pulsing process (RGPP) was developed...
Reactive pulse magnetron sputtering processes are of increasing interest for the deposition of high-...
International audienceTiOx, TiNy and TiOxNy thin films were deposited by reactive sputtering. The re...
This work aims at controlling the deposition process of silicon oxynitride thin films by reactivespu...
International audienceTantalum oxynitride films can be deposited with a high versatility in composit...
Tantalum oxynitride thin films have been deposited by reactive magnetron sputtering, using a fixed p...
The aim of this work is to study the structural, optical and electrical properties of silicon oxynit...
Le but de ce travail de recherche a été d’une part, de contrôler le procédé d’élaboration decouches ...
The main purpose of this work is to present and to interpret the change of structure and physical pr...
International audienceThis paper reports on the first study of structural and optical properties of ...
Tantalum oxynitride thin films have been deposited by reactive magnetron sputtering, using a fixed p...
Le système antireflet (SAR) est d‟une grande importance pour les cellules photovoltaïques (PV), surt...
International audienceSilicon oxynitride thin films were sputter deposited by the reactive gas pulsi...
In a single process run, an amorphous silicon oxynitride layer was grown, which includes the entire ...
International audienceOxynitride materials, which offer the possibility of merging oxide and nitride...
An original reactive sputtering method, namely the reactive gas pulsing process (RGPP) was developed...
Reactive pulse magnetron sputtering processes are of increasing interest for the deposition of high-...
International audienceTiOx, TiNy and TiOxNy thin films were deposited by reactive sputtering. The re...
This work aims at controlling the deposition process of silicon oxynitride thin films by reactivespu...
International audienceTantalum oxynitride films can be deposited with a high versatility in composit...
Tantalum oxynitride thin films have been deposited by reactive magnetron sputtering, using a fixed p...
The aim of this work is to study the structural, optical and electrical properties of silicon oxynit...
Le but de ce travail de recherche a été d’une part, de contrôler le procédé d’élaboration decouches ...
The main purpose of this work is to present and to interpret the change of structure and physical pr...
International audienceThis paper reports on the first study of structural and optical properties of ...
Tantalum oxynitride thin films have been deposited by reactive magnetron sputtering, using a fixed p...
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