Rapid, semi-quantitative elemental depth profiling using plasma profiling time-of-flight mass spectrometry

International audiencePlasma Profiling Time-Of-Flight Mass Spectrometry (PP-TOFMS) is a novel elemental depth profiling technique developed by Horiba Scientific. It couples an argon plasma source for sample sputtering and ionization with an orthogonal time-of-flight mass spectrometer. The technique delivers nanometer-scale depth profiles with high sensitivity and is capable of providing calibration-free semi-quantitative results. Moreover, the operation of the instrument is simpler and faster compared to typical SIMS instruments requiring only a few minutes including sample introduction and pumping.The instrument is installed in a cleanroom at CEA-Leti in close proximity to process tools allowing fast feedback for materials development. The potential of this technique will be illustrated by several examples