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Preparation of AIN Thin Films by Reactive Ion Beam Sputtering and The Optical Properties

土屋, 竜二
ツチヤ, リュウジ
Tsuchiya, Ryuji
細田, 隆広
ホソダ, タカヒロ
Hosoda, Takahiro
中川, 靖夫
ナカガワ, ヤスオ
Nakagawa, Yasuo
大谷, 文雄
オオタニ, フミオ
Ohtani, Fumio
谷治, 環
ヤジ, タマキ
Yaji, Tamaki

Publication date

September 2007

Publisher

社団法人照明学会

Abstract

rights: 社団法人照明学会 rights: 本文データは学協会の許諾に基づきCiNiiから複製したものである relation: isVersionOf: http://ci.nii.ac.jp/naid/110004587052

Extracted data

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