The switching speed of a micromachined switch is calculated by using elastic beam as well as thin plate models. The effect of pre-tightening to achieve higher eigenfrequency of the deflected member is also investigated. A performance parameter is introduced to describe the functioning of the switch in order to take into account not only fast switching, but also the necessary pull-in voltage for the device. Three switch-configurations are analyzed by finite elements and optimum geometrical parameters were searched
This paper presents a low-actuation-voltage micro-electromechanical system (MEMS) capacitive shunt s...
The study investigates the design and fabrication of a micromachined radio frequency (RF) capacitive...
The study investigates the design and fabrication of a micromachined radio frequency (RF) capacitive...
The switching speed of a micromachined switch is calculated by using elastic beam as well as thin pl...
A well designed capacitive micro-machined switch requires small electrostatic pull-in force to easy ...
The non-linear behavior of capacitive microelectromechanical switches for reconfigurable antenna app...
This paper is focused on the creation of an efficient electromagnetic model of MEMS switches which o...
Research on MEMS (Micro Electro Mechanical systems) has seen an amazing growth during the last 15 ye...
This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electrom...
This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electrom...
This paper presents a low-actuation-voltage micro-electro-mechanical system (MEMS) capacitive shunt ...
The operating principle of magnetically controlled microelectromechanical system (MEMS) switches is ...
Squeeze-film damping and acceleration load are two major issues in the design of inertial micro-swit...
This paper presents a low-actuation-voltage micro-electro-mechanical system (MEMS) capacitive shunt ...
This paper presents a low-actuation-voltage micro-electro-mechanical system (MEMS) capacitive shunt ...
This paper presents a low-actuation-voltage micro-electromechanical system (MEMS) capacitive shunt s...
The study investigates the design and fabrication of a micromachined radio frequency (RF) capacitive...
The study investigates the design and fabrication of a micromachined radio frequency (RF) capacitive...
The switching speed of a micromachined switch is calculated by using elastic beam as well as thin pl...
A well designed capacitive micro-machined switch requires small electrostatic pull-in force to easy ...
The non-linear behavior of capacitive microelectromechanical switches for reconfigurable antenna app...
This paper is focused on the creation of an efficient electromagnetic model of MEMS switches which o...
Research on MEMS (Micro Electro Mechanical systems) has seen an amazing growth during the last 15 ye...
This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electrom...
This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electrom...
This paper presents a low-actuation-voltage micro-electro-mechanical system (MEMS) capacitive shunt ...
The operating principle of magnetically controlled microelectromechanical system (MEMS) switches is ...
Squeeze-film damping and acceleration load are two major issues in the design of inertial micro-swit...
This paper presents a low-actuation-voltage micro-electro-mechanical system (MEMS) capacitive shunt ...
This paper presents a low-actuation-voltage micro-electro-mechanical system (MEMS) capacitive shunt ...
This paper presents a low-actuation-voltage micro-electromechanical system (MEMS) capacitive shunt s...
The study investigates the design and fabrication of a micromachined radio frequency (RF) capacitive...
The study investigates the design and fabrication of a micromachined radio frequency (RF) capacitive...