Wall Shear Stress Sensors Based on Carbon Nanotube Pillars

Increasingly smaller fluid flow devices depend on increasingly smaller sensors to operate. In this work, we develop a miniature wall shear stress sensor consisting of a pair of carbon nanotube pillars that produce a measurable capacitance change when one is deflected by the flow. The sensor, including material producing the capacitance change, has a 50 μm × 60 μm footprint and